Independent claims are also included for the following: (1) a method for production of a micro-structured component (2) a micro-structured component.ベルントヴァルムギュンターデンゲル
Shipping in 2013, the NXE:3300 is the second generation of ASML’s EUV exposure platform. We review the current status of EUV optics production for the NXE:3300 tools. Four customer systems of the StarlithTM3300 series have been delivered so far. These sets of optics are characterized ...
XUV/EUV X-ray OpticsNTT-AT has developed and sold many kinds of optical elements to manipulate X-rays and extreme ultraviolet for a long time. They have acquired a high-level reputation for their design and production technologies that have been cultivated by co-development with many researchers...
Extreme-ultraviolet (EUV) lithography remains a leading contender for use in the mass production of nanoelectronics at the 32 nm node. Great progress has b... PP Naulleau,JP Cain,KA Goldberg - 《Applied Optics》 被引量: 15发表: 2006年 加载更多研究...
Optical metrology in the VUV and EUV spectral range and F_2 laser in the near- and far-field, can be used as an alternative to interferometric measurements for 'at wavelength' testing of optics, e.g... K. Mann,S Kranzusch,G Eckert,... - Advanced Characterization Techniques for Optical...
- Optics for Euv, X-ray, & Gamma-ray Astronomy III 被引量: 3发表: 2007年 High Throughput Replica X-Ray Optics In the last years the interest in high throughput focusing x-ray optics has been increasing rather rapidly. High photon collecting power is the most import... O Citterio,PL ...
its subsidiary Cymer and optics giant Zeiss, to develop the systems. The EUV lithography technology quickly generated interest from major semiconductor manufacturers, according to the company, with such end-users placing orders for the systems, to ramp up their mass production throughout 2018 and 201...
Corning Advanced Optics is dedicated to high-end, ultra-precise coatings. With complete thin-film metrology from EUV to IR and over 200 proprietary coating designs from AR to HR, we have multiple finishing solutions for a variety of materials and high-volume production capacity. Our specialized ...
The SYRUSpro delivers unsurpassed performance and productivity for your 24/7 optical filter volume production. From deep ultraviolet (DUV) to visible spectrum (VIS) and infrared (IR) spectral range, this is your benchmark solution. Stories
This supports EUV resist and EUV mask developments intended to meet the international technology road map for semiconductors and associated decreasing linewidths. Advanced development and production is expected to take place over a 22-month period and will be carried out by Zygo’s Extreme Precision...