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光学光刻技术(Optical lithography)分享 (Optical lithography),也称为光学平版印刷术或紫外光刻,是在其他处理步骤(例如沉积,蚀刻,掺杂)之前用光刻胶对掩模和样品进行构图的方法。 设备 1.1 HMDS及涂胶 标准旋转工艺中包括HMDS蒸汽预处理 烤箱-批量处理多个晶圆 HMDS也可以在手动旋转器上旋转涂布 4)涂胶机上进行光刻...
美 英 un.光刻 网络光学光刻;光学微影;光微影术 英汉 网络释义 un. 1. 光刻
optical lithography 光学制版 lithography oven 印铁烘房 offset lithography 胶版印刷术 lithography roll 石印胶滚 Electron Beam Lithography 电子束石版印刷术这是一种比较复杂而且高价的石版印刷处理方法,将放射敏感胶片放到一个装有扫描束电子显微镜的真空槽里面,用一个由数字计算机控制的电子束来使胶片感测,...
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Optical lithography's ubiquitous use is a direct result of its highly parallel nature allowing vast amounts of information (i.e. patterns) to be transferred in a very short time. For example, considering the specification of a modern leading edge scanner (150 300-mm wafers per hour and 40-...
Optical Lithography 作者:Burn Jeng Lin 页数:500 定价:664.00 元 ISBN:9780819475602 豆瓣评分 评价人数不足 写笔记 写书评 加入购书单 分享到 + 加入购书单
Opticallithographyisaphoton-basedtechniquecomprisedofprojecting,orshadowcasting,an imageintoaphotosensitiveemulsion(photoresist)coatedontothesubstrateofchoice.Todayitis themostwidelyusedlithographyprocessinthemanufacturingofnano-electronicsbythe semiconductorindustry,a$200Billionindustryworldwide. ...
Twitter Google Share on Facebook photolithography (redirected fromOptical lithography) Thesaurus Encyclopedia Related to Optical lithography:Electron beam lithography pho·to·li·thog·ra·phy (fō′tō-lĭ-thŏg′rə-fē) n. A planographic printing process using plates made according to a phot...
Optical lithography is a photon-based technique comprised of projecting, or shadow casting, an image into a photosensitive emulsion (photoresist) coated onto the substrate of choice. Today it is the most widely used lithography process in the manufacturing of nano-electronics by the semiconductor indu...