achieve design intent in the lithographic process since the late 1990's with the introduction of the 180 nanometer (nm) technology nodes, but with continued push of the current ArF immersion imaging hardware into the sub-20nm nodes, traditional OPC modeling approaches are struggling to...
OPC modeling is a complex process that requires careful planning and execution. OPC建模是一个复杂的过程,需要仔细的规划和执行。 First and foremost, it is important to understand the requirements and objectives of the OPC modeling project. 首先,重要的是要了解OPC建模项目的需求和目标。 This involves ...
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参考文献: [1] F. X. Zach, “Neural-network-based approach to resist modeling and OPC,”SPIE Proc.v.5377, doi:10.1117/12.535931, May 2004. [2] Y. Watanabe, T. Kimura, T. Matsunawa, and S. Nojima, “Accurate lithography simulation model based on convolutional neural networks,”SPIE Pro...
选择modeling-v1_0,同时修改生成对象保存的路径,建议选择与 UaModeler 工程同路径下,如图 113所示。 图113 选择对象类型 选择基本模型,点击画面中Find another model按钮,在弹出的文件选择窗体中,将筛选类型选为*.xml,选则plc.xml文件,如图 114所示。
专利名称：Optical proximity correction (OPC) modeling methods and methods for manufacturing semiconductor device using the same 发明人：Sang Chul Yeo 申请号：US16693903 申请日：20191125 公开号：US11023651B2 公开日：20210601 专利内容由知识产权出版社提供 专利附图：摘要：A method for manufacturing a ...
Buiding instructions Linux (Note that umx did not undergo intensive testing in linux.) : Install the required libraries. Build wxWidgets (For more options/details on the compilation:https://wiki.wxwidgets.org/Compiling_and_getting_started) ...
So, several methods [1-3] have been reported for improving the accuracy of OPC modeling, but the model fitting becomes more complex as the increase of... SL Tsai,F Lo,E Yang,... - Conference on Optical Microlithography 被引量: 0发表: 2008年 ...
Data Contextualization: Utilize MDB's information modeling to map OPC Classic items into meaningful OPC UA objects. Why Choose OPCtoUA MDBA: Enterprise-grade performance and scalability via the MDB platform Flexible OPC item exposure and access control Firewall-friendly architecture with optional UA...
framework. This style of service-oriented architecture (SOA) integrates distributed software components and ensures interoperability and communications. A multi-layer approach to OPC architecture offers platform independence, security, the ability to add new features, information modeling, and functional ...