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Grudowski, P., et al., “1-D and 2-D Geometry Effects in Uniaxially-Strained Dual Etch Stop Layer Stressor Integrations,” 2006 Symposium on VLSI Technology Digest of Technical Papers, IEEE, 2 pages. Huang, X., et al., “Sub-50 nm P-Channel FinFET,” IEEE Transactions on Electron ...