TWINSCAN系列是目前世界上精度最高,生产效率最高,应用最为广泛的高端光刻机型。目前全球绝大多数半导体生产厂商,都向ASML采购TWINSCAN机型,例如英特尔(Intel),三星(Samsung),海力士(Hynix),台积电(TSMC),联电(UMC),格罗方德(GlobalFoundries)及其它台湾十二吋半导体厂。TWINSCAN NXE:3300BNA 0.33Resolution ≤ 22 nm...
Currently, development of second-generation laser-produced plasma (LPP) light sources for the ASMLâs NXE:3300B EUV scanner is complete, and ... I Fomenkov,D Brandt,A Ershov,... - 《Advanced Optical Technologies》 被引量: 3发表: 0年 Spectral purity performance of high-power EUV...
The focus of the presentation will be on the NXE:3400B scanner, ASML's fifth generation EUV lithography tool intended for the sub 10 nm volume productionFurthermore the ASML roadmap, NXE:3300B and NXE:3350B field data and field ... RV Es,MVD Kerkhof,L Levasier,... - Society of Pho...