J. Shin et al., "Measurement technique of nontelecentricity of pupil-fill and its application to 60 nm NAND flash memory patterns," Proc. SPIE 5754, 294-302 (2005). 5. G. McIntyre et al., "Modeling and experiments of non-telecentric thick mask effects for EUV lithography,"...
If the conventional resolution enhancement technique (RET) of off-axis illumination (OAI) is used, such mask-side non-telecentricity degrades aerial image contrast partly because of asymmetry (w.r.t. the mask) of the two beams in an incident beam pair and partly because of asymmetry (w.r....
The influence of such discreteness on telecentricity is thoroughly studied based on rod and diffusing components. Also, the factors that impact on telecentricity matching errors such as lens design, misalign and coating defect are discussed and deduced into formula expression. According to the ...
The influence of such discreteness on telecentricity is thoroughly studied based on rod and diffusing components. Also, the factors that impact on telecentricity matching errors such as lens design, misalign and coating defect are discussed and deduced into formula expression. According to the ...