micromachines Article Development and Characterization of Non-Evaporable Getter Thin Films with Ru Seeding Layer for MEMS Applications El-Mostafa Bourim 1,* , Hee Yeoun Kim 1 and Nak-Kwan Chung 2 1 National Nanofab Center, Department of Nanostructure Technology, Daejeon 34141, Korea; hyeounkim@n...
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