Tokyo, Japan – December 6, 2023 –Nikon Corporation (Nikon) is pleased to announce the release ofthe NSR-S636E ArF immersion scanner, with system sales launching in January 2024. With the highest productivity of any lithography system across the impressive history of Nikon, the NSR-S636E is ...
The NSR-S636E is an immersion lithography scanner for critical layers that delivers superior overlay accuracy and ultra-high throughput. Learn More NEWS AND EVENTS Nikon at SPIE! February 23-27, 2025 Nikon is pleased to sponsor the industry’s flagship SPIE Advanced Lithography + Patterning confere...
由于3D半导体制造过程中晶圆翘曲和变形更容易发生,因此需要比以往更先进的曝光机进行校正和补偿功能。 NSR-S636E是专为关键层设计的沉浸式曝光机,具备更高的精度,能够测量晶圆翘曲、扭曲和其他变形,并实现高重叠精度(MMO ≤ 2.1 nm)。采用增强型iAS系统,该创新系统在高精度测量和广泛的晶圆翘曲和畸变校正方面表现出色...
Nikon Precision | USA & Europe |Nikon Global Site PRODUCTS Immersion and Multiple Patterning Deep UV i-Line Semiconductor Inspection Systems MEMS Steppers and Metrology FEATURED PRODUCTS Introducing the NSR-S636E ArF Immersion Scanner The NSR-S636E is an immersion lithography scanner for critical layers...
Tokyo, Japan – December 6, 2023 – Nikon Corporation (Nikon) is pleased to announce the release of the NSR-S636E ArF immersion scanner, with system sales launching in January 2024. With the highest productivity of any lithography system across the impressive history of Nikon, the NSR-S636E....
s semiconductor manufacturers are met with products like the recently announced NSR-2205iL1 5x reduction i-line stepper. These are coupled with ultra-high productivity dry NSR-S322F ArF and NSR-S220D KrF scanners. The industry-leading NSR-S636E and NSR-S625E scanners also satisfy advanced ...
2023年12月6日 ArF液浸スキャナー「NSR-S636E」を発売 2023年8月31日 縮小投影倍率5倍 i線ステッパー「NSR-2205iL1」を発売 ニュース一覧 出展情報 SEMICON China 2025 2025年3月26日～28日 Shanghai New International Expo Centre, Shanghai, China...
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Oct. 22, 2024 Nikon Announces Development of a Digital Lithography System with 1.0 micron (L/S) resolution Mar. 29, 2024 Nikon Corporation Earns Intel's 2024 EPIC Distinguished Supplier Award with Safety Distinction Dec. 6, 2023 Nikon Releases the NSR-S636E ArF Immersion Scanner ...
ASML:增加了最新NA值 .55得TWINSCAN EXE;增加了若干老机型的数据(部分数据参考了公众号:TOM聊芯片智造,特此感谢)NIKON:增加最新的NSR S636E等两三款型号 CANON:增加FPA Stepper机型若干 基本上,这个表格大体囊括了市面上主流的光刻机数据了,值得大家参考和收藏(限于我个人能力,很可能还有个别遗漏的,也麻烦大家给...