Improving the yield necessitates ClF3 recovery rate improvement, but characteristics of using ClF + F-2 = ClF3 as an equilibrium reaction can be overcome with a two-step reaction. NH4F/nHF can be recycled continuously by controlling the n value in NH4F/nHF through NH3 addition and HF ...
N22✔️ F66✔️ Alis not balanced. Add2molecules ofAlF3to the product (right-hand) side to balance Aluminium: 2Al2O3+2NF3=4AlF3+ N2+3O2 ReactantsProducts Al44✔️ O66✔️ N22✔️ F612❌ Fis not balanced. Add2molecules ofNF3to the reactant (left-hand) ...
摘要: 本文采用CF_4、SF_6和NF_3三种腐蚀气体对硅进行反应离子腐蚀,研究了腐蚀表面粗糙度与腐蚀工艺条件(气压、射频功率),附加气体和腐蚀深度等因素之间的关系。并通过SEM和Auger能谱仪分析,探讨了引起腐蚀表面粗糙的原因。 展开 关键词: 反应离子刻蚀;腐蚀工艺;表面粗糙率 DOI: CNKI:SUN:BDTX.0.1993-06-006...
The NOX from NF3 is allowed to react with the NH3 and converted into harmless nitrogen and water, the remainder consisting of the fine particles of SiO2, etc., NH3, F2 and SiF4 is washed with cooling water from a washing part 10 at the succeeding stage of the reaction part 3, hence ...
The NOX from NF3 is allowed to react with the NH3 and converted into harmless nitrogen and water, the remainder consisting of the fine particles of SiO2, etc., NH3, F2 and SiF4 is washed with cooling water from a washing part 10 at the succeeding stage of the reaction part 3, hence ...