nanomeasuring machineAbbe offset-free designminiature plan mirror interferometersThe paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having...
Two multibeam interferometers were designed to measure the angular errors of the guide systems of a 3D nanopositioning and nanomeasuring machine, and the detected angular errors were compensated by a close-loop control system [18]. The angular errors of the stage were detected by two linear ...
1.At the Institute of Process Measurement and Sensor Technology of Technical University of Ilmenau, a three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) has been developed.伊尔梅瑙工业大学过程测量和传感技术研究所研制了三维纳米定位和测量机 (NPMM ) 。 2.The principle of polarimet...
A nanopositioning and nanomeasuring machine: operation – measured results. Nanotechnol. Precis. Eng. 2004; 2 :81–4.Gred J , Rainer G , Eberhard M , et al. A nanopo sitioning and nanomeasuring machine :operation2measured results[J ] . Nano2 technology and Precision Engineering ,2004 ,2...
A Nanopositioning and Nanomeasuring Machine: OperationMeasured Results. J GER Gerd,GR NWALD Rainer,MANSKE Eberhard,HAUSOT TET ino,FL Roland. Nanotechnology and Precision Engineering . 2004J GER Gerd,GR NWALD Rainer,MANSKE Eberhard,HAUSOT TET ino,F LRoland.A Nanopositioning and Nanomeasuring Machine...
Technical University Ilmenau, Institute of Process- and Sensor Engineering, Ilmenau, GermanyJohn Wiley & Sons, LtdMANSKE, E. ; MASTYLO, R. ; HAUSOTTE, T. ; HOFMANN, N. ; JA¨ GER, G.: Advances in traceable nanometrology with the nanopositioning and nanomeasuring machine. In: HASCHE, K....
The nanopositioning and nanomeasuring machine NMM-1 developed at the Ilmenau University of Technology was designed for measurements within a measuring volume of 25 脳 25 脳 5 mm. The interferometric length measuring and drive systems make it possible to move the stage and corner mirror with a ...
In the Collaborative Research Centre 622 "Nanopositioning- and Nanomeasuring Machines" promoted by the Deutsche Forschungsgemeinschaft the scientific-technical foundations to the design and the realisation of nanopositioning- and nanomeasuring machines are developed. These machines enable the ...
WW Machleidt, T.; Sparrer, E.; Manske, E.; Kapusi, D.; Franke, K-H.: Area-based optical 2.5D sensors of a nanopositio- ning and nanomeasuring machine. Measurement Science and Technology 23 (212) 074010T. Machleidt et al., Area-based optical 2.5D sensors of a nanopositioning and...
Nanopositioning and nanomeasuring machineTwo-photon absorptionLaser power controllingSince the first realization of two-photon direct laser writing(DLW)in Maruo et al.(Opt Lett 22:132-134,1997),the manufacturing using direct laser writing techniques spread out in many laboratories all over the world....