NanofabricationTechniques and Principlesdoi:10.1007/978-3-7091-0424-8Stepanova, MariaDew, StevenSpringer Vienna
In the development of the past few decades, nanofabrication technology has promoted the rapid development of integrated circuits and realized the high integration of devices. The main difference between nano-processing technology and traditional processing technology is that the size of the device structur...
Nanofabrication: Techniques and Principles Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creatin... M Stepanova,S De...
The chapter on self assembly synthesis from low dimensional building blocks such as DNA, viruses, and proteins provides an overview of fabrication techniques to obtain a usable structure such as sensors. This section also describes techniques to create synthetic collagen for tissue engineering. ...
However, there remains a lot of challenges, relating to the resolution, cost, speed, and so on, in realizing high-quality products with further development of nanotechnology. None of the existing techniques can satisfy all the needs in nanoscience and nanote...
As an alternative strategy, bottom-up self-assembly applies techniques of chemical assembly and molecular recognition to bring together individual atoms, molecules, or supramolecular building blocks to form useful constructs. This massively parallel method will be useful for producing well-defined ...
Nanofabrication process refers to the creation of designed nanostructures with dimensions less than 100 nm, using various synthesis techniques such as co-precipitation, sol-gel, hydrothermal, and ball-milling. This process focuses on the use of nanoparticles in complex multifunctional devices. ...
techniques, as well as advanced theoretical designs, with which various buckling and twisting of morphable 3D mesostructures have been achieved (Fig.3e)90. More recently, Liu et al. developed a metal-assisted transfer strategy on an elastic substrate and fabricated high-resolution nanostructures with...
progress, it is still not well suited for metals38. In other words, finding a way for high yield of the metallic nanoparticles and their assemblies and agglomeration to form a 3D nanoporous structures is a difficult task, which cannot be performed with the traditional fabrication techniques. ...
2.1-化学汽相淀积(CVD)与CVD反应器的基本原理Basic principles of CVD and CVD reactors 14:16 2.2-不同操作压力下的CVD技术,等离子体增强CVD和金属有机CVD CVD techniques at different operating pressu 12:10 2.3-原子层CVD (ALD)和硅的热氧化 Atomic layer CVD (ALD) and thermal oxidation of silicon 08...