The MSA-600 Micro System Analyzer is the all-in-one optical measurement workstation for characterizing surface topography as well as in-plane and out-of-plane motions. The versions MSA-600-M/V cover frequency ranges up to 25 MHz, ideally suited for MEMS, MEMS microphones and other ...
MSA-600-S Micro System Analyzer for testing MEMS and high frequency resonators up to 8 GHZ Measure and test MEMS optically in RnD and at production level Polytec MSA-600 integrated into a MPI probe station MSA-600-S Micro System Analyzer for testing MEMS and high frequency resonators up to ...