The analysis starts from the hypothesis of a constant load current IL flowing through the inductor L and the diode D before the commutation (turn-on) process. After the MOSFET input has been connected to the voltage source (VSOURCE=...
Next, a conductive silver (Ag) film with a thickness of 200 nm was deposited on the crackle template using an e-beam evaporator (Technol Co., China) at room temperature (with base vacuum of 4 × 10−4 Pa, accelerating voltage of 9 kV and beam current of 240 mA)....
installed outside the plasma chamber or a single work coil surrounding the plasma chamber may work satisfactorily as connected to the high-frequency power source by the capacitive coupling or inductive coupling according to need. It is essential at any rate to avoid thermal denaturation of the ...