MEMS-based high-frequency vibration sensors We present the development of two vibration sensors, one designed for out-of-plane sensing and one designed for in-plane sensing. Both sensors, fabricated ... AW Harris,IJ Oppenheim,DW Greve - 《Smart Materials & Structures》 被引量: 9发表: 2011年...
Herein, we demonstrate the feasibility of using microelectromechanical system (MEMS) vibration sensors in petrochemical plants by experimentally comparing their performance with those of conventional vibration sensors on the basis of the prediction accuracy of a one-dimensional time-series convolutional ...
A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investigat...
Currently there are no chip-scale, compact accelerometers that meet these high-sensitivity and low-bandwidth requirements. The fundamental challenges in building such a device include designing very high sensitivity displacement sensors with low thermo-mechanical noise and minimizing 1/f noise. A ...
MEMS sensors have been proven to be an effective medium for sensors combined with on-chip electronic circuitry. It can therefore function not only as a portable sensor chip but can also be linked as part of the Internet of Things (IoT) network to achieve real-time and remote high-sensitivity...
(600 rpm) produces very little vibration. While it is well understood that measuring high frequency vibration data with high sensitivity sensors can help to detect certain faults (bearing spalling, gear meshing, and pump cavitation) and give potential insights into the remaining useful life of an ...
Micro Electromechanical Systems (MEMS) based microfluidic devices have gained popularity in biomedicine field over the last few years. In this paper, a comprehensive overview of microfluidic devices such as micropumps and microneedles has been presented
attached to the proof mass as the movable electrodes; one spring shape cantilever beam supported by anchors as the stationary electrode; and the compact constraint structures consisting of constraint layer with holes and reverse constraint blocks to limit the vibration in the reverse sensitive direction...
sensors are investigated. For gaseous pollutant detection, nanostructured metal oxide, surface acoustic wave sensors, field-effect transistor sensors, and microcantilever sensor system are briefly discussed. Sensors with a microelectromechanical systems (MEMS) technology showed high sensitivities, accuracy, ...
However, they are appropriate for measurement of vibrations and widely used due to their sensitivity, high frequency response and availability in various forms, e.g., plastics, crystals and ceramics [36,37]. Finally, skin acceleration tactile sensors aim to duplicate the human fingertips that can...