MEMS-based high-frequency vibration sensors We present the development of two vibration sensors, one designed for out-of-plane sensing and one designed for in-plane sensing. Both sensors, fabricated ... AW Harris,IJ Oppenheim,DW Greve - 《Smart Materials & Structures》 被引量: 9发表: 2011年...
MEMS (microelectromechanical system)-based accelerometers are often used for measuring frequency. Compared with piezoelectric sensors, they feature a higher resolution, excellent drift and sensitivity characteristics, and a better signal-to-noise ratio (SNR). They also enable detection of low frequency ...
A complete design flow of the vibration-based energy harvester using the finite element method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester, and harmonic analysis is performed to investiga...
The recent development of Micro-Electro-Mechanical System (MEMS) technology has provided new methods for researchers to design and fabricate seismometers and geophones in small scale which will enable seismic sensors achieve higher sensitivity with a larger frequency band when compared with traditional in...
Currently there are no chip-scale, compact accelerometers that meet these high-sensitivity and low-bandwidth requirements. The fundamental challenges in building such a device include designing very high sensitivity displacement sensors with low thermo-mechanical noise and minimizing 1/f noise. A ...
(600 rpm) produces very little vibration. While it is well understood that measuring high frequency vibration data with high sensitivity sensors can help to detect certain faults (bearing spalling, gear meshing, and pump cavitation) and give potential insights into the remaining useful life of an ...
Micro Electromechanical Systems (MEMS) based microfluidic devices have gained popularity in biomedicine field over the last few years. In this paper, a comprehensive overview of microfluidic devices such as micropumps and microneedles has been presented
operate over a broad frequency range, are less sensitive to frequency jumps, and are highly resistant to mechanical shock, vibration, and temperature changes. As a result, this technology has been helpful for developing small-sized timing solutions that are also robust, high-performing, and ...
However, they are appropriate for measurement of vibrations and widely used due to their sensitivity, high frequency response and availability in various forms, e.g., plastics, crystals and ceramics [36,37]. Finally, skin acceleration tactile sensors aim to duplicate the human fingertips that can...
MEMS-based gyroscopes, at present, are considered as low-accuracy rate-grade sensors compared to the tactical and inertial-grade sensors which are known to have moderate to high accuracies. However, MEMS-based gyroscopes offer cost and size advantages compared to the tactical and inertial grade ...