We report on THz MEMS sensors suitable for large focal plane arrays and readout schemes compatible with real-time imaging. Terahertz absorption near 100 %, optimized to particular monochromatic quantum cascade
Similarly, LWIR and THz sensors are used in camera sensor systems. Some electromechanical systems are applied in medical imaging, such as endoscopes and exoscopes. X-ray sensors include direct and indirect sensing configurations. Other electromechanical systems include scanners for light detection and ...
The feasibility of TMA is validated as the experimental absorption spectra are well meet the simulation results. The above results indicate the proposed TMA possesses great potential applications in multiple resonance switches, polarization switches, and highly efficient environmental sensors....
NAND logic gate and multiple-input–output states in the near-field confined energy of MEMS Fano-metasurface.a–dThe numerically calculated electric field distributions at 0.55 THz, wherea–crepresent the true states of the electric field confinement (E = 1), whereasdshows the false sta...
The realization of metamaterial absorbers in THz frequencies allows more efficient energy harvesting for imaging and sensing to be performed in planar structures, which are suitable for integrated devices. For applications such as single pixel imaging or spectroscopy, two key figures of merit are the ...
Abstract During the last decade, IR MEMS thermopile detectors have become a topic of increasing interest because of their reliable characteristics and excellent cost-performance ratio. Because of their many attractive characteristics, thermopile detectors have been frequently used in various IR detection ap...
One of the MEMS physical sensors that integrate with metamaterials is the infrared or THz radiation detector. Unlike the III-V or 2D material based photodetector, there are no electron-hole pairs generated in the MEMS-based radiation detector. Instead, the heat generated by the incident EM wave...
We report on THz MEMS sensors suitable for large focal plane arrays and readout schemes compatible with real-time imaging. Terahertz absorption near 100 %, optimized to particular monochromatic quantum cascade laser (QCL) illumination sources, was achieved using metal-dielectric metasurfaces. MEMS ...