:Evaluates the micro-electromechanical systems (MEMS) technology optical switches. Multiple applications of MEMS; Mechanical components; Fundamental principle; Design approaches.FernandezMarcKruglicE.LightwaveM. Fernandez,E. Kruglic.MEMS technology ushers in a new age in optical switching. Journal of ...
Micro electro mechanical systems (MEMS) technology [1] plays an important role in the optical switching space. It brings many of the advantages of macroscopic opto-mechanical switching and adds many desirable features [2]. Conventional mechanical optical switches, which are discussed in Chapter 8, ...
photonic switching systemstelecommunication control2D approaches3D approachesactuating mechanismsLeveraging MEMS's inherent advantages such as the batch fabrication technique, small size, integrability, and scalability, MEMS is positioned to become the dominant technology in optical crossconnect switches. MEMS ...
3D optical switch with wiggly actuator.The first is formed with monolayer bulk silicon structure,the others use the silicon on glass bonding structures.Their principles of operation are all based on silicon digital micromirrors technology.The electrostatic actuators with low driving voltage are used in...
The basic concept of optical switch,MEMS and MEMS optical switch were introduced.Based on the function realization,the theory and characteristics of 2D and... HU Jian,LI Gang-Yan - 《Semiconductor Technology》 被引量: 17发表: 2007年 Topography of micromirror for metal MEMS optical switch based...
Applied in MCS (multicast switching optical switch) MCS based on PLC technology and MEMS technology is a key component of the next generation reconfigurable optical add/drop multiplexing system (ROADM). Each functional unit is composed of M independent splitters and N independent MEMS optical switches...
MEMSisposi- tionedtobecomethedominanttechnologyin opticalcrossconnectswitches.MEMSoptical switcheswithcomplexmovable3Dmechanical structures,micro-actuators,andmicro-opticscan bemonolithicallyintegratedonthesamesub- stratebyusingthematuredfabricationprocess oftheintegratedcircuitindustry.Inthisarticle wereportvariouspopular...
- 《IEEE Photonics Technology Letters》 被引量: 48发表: 2004年 Simulation and Realization of Free Space Optical Switch Architecture Based on MEMS Vertical Mirrors In this paper, we report on a novel optical cross-connect switch architecture based on MEMS vertical mirrors. The switch consists of ...
MEMS optical switch for optical communication is fabrication by silicon surface micromachining technology. Surface micromachining technique, based on the standard CMOS processes, in the other hand, offers greater flexibility for realizing free-space optical systems on a single chip. A fully micromachined ...
Early applications of MEMS were biomedical and automotive such as drug delivery system, disposable blood pressure sensors, accelerometer used in airbag sensor and antilock braking systems. Recently, this technology, known as micro-optical MEMS or MOEMS, is invading the fiber optic communication ...