and output it to the start-stop system to save energy consumption. This is a MEMS piezoresistive sensor, which has the characteristics of high precision, high integration, high sensitivity, good stability and low power consumption. Product parameters Working pressure: -120kPa(G)~5kPa(G)(range c...
Working current: 800μA Standby current consumption: 0.2μA Operating temperature: 5 to 45℃ Vacuum cleaner pressure sensor 0.5-4.5V analog output sensor 总机电话:+86-755-89691118 传真:+86-755-89695955 销售邮箱:sales24@ampron.com 采购邮箱:itcc@ampron.com 公司地址:深圳市坪山区坑梓街道金沙社区规...
In this manuscript, two Micro-Electro-Mechanical System (MEMS) capacitive pressure sensors with different dielectrics are designed and simulated with device simulation software. This paper describes the performance analysis of a capacitive pressure sensor working on the electromechanics interface. The ...
In addition to piezoresistive sensors, miniature capacitive resonant pressure sensors (RPSs) have been developed with high accuracy and resolution. Li et al.55developed a resonant pressure sensor in which the pressure diaphragm stress changes under pressure, causing the stiffness of the diaphragm to sh...
WF200D Pressure Sensor Working Measuring Pressure -10~10kPa Constant voltage supply 1.8~3.6V Constant current supply 5.4uA Resolution 0.001 Relative Accuracy ±0.003 Standby current(uA) <0.1 interface I2C/SPI Operating temperature -40~85℃ Size 10.3*10.3*10.3mm Packaging and delivery Selling Units:...
All the components are designed and manufactured directly for the integrated working: This guarantees best technical performance, cost optimization, one-shot factory integration A single equipment combines the elements of handling, contacting and complete testing of MEMS devices, including physical stimulus...
In order to increase the stabilization and reliability of piezoresistive pressure sensor working in a harsh environment where relatively harsh acids, alkal... SAN HaiSheng,SONG ZiJun,YU Xiang,... 被引量: 0发表: 2011年 加载更多研究点推荐 MEMS压阻式压力传感器 ...
sensorworkingperformanceissimulatedwithANSYSand FLUENTsoftwaretoanalysetemperaturedriftofsensor,itscapacitancesensitivity,theheatingpowerandthematc- hingviaholesize.Analysisresultsshowthatsensorcapacitivetemperaturedriftofthesensoris0.029fF/K,capaci- tivesensitivityis30fF/kPa.Heatingcavityaircanmakethecavityairpressure...
Working pressure: -5~5kPaG(range can be customized) Precision: ±1%VCC(0~70℃) Total error band: ±1.5%VCC(-40~0℃) ±1.5%VCC(70~125℃) Operating temperature: -40℃~125℃ Storage temperature: -40℃~125℃ Protection pressure: 10kPaG ...
2. Working Principle of MEMS Pressure Sensor The structure diagram and the image of the MEMS pressure sensor are shown in Figure 1, which is mainly composed of the F-P cavity and grin-lens. The F-P cavity is composed of Silicon-On-Insulator (SOI) wafer and glass plate. The SOI wafer...