In this paper, the FM working principle is formalized for the three-axial case for the first time and the governing equations are derived both in the idealized case of a point-mass gyroscope and in the real case of a distributed-mass gyroscope. Moreover, the mechanical structure of the ...
In order to realize the precise control for the drive frequency of the micro electromechanical system (MEMS) gyroscope, a frequency control scheme based on phase locked loop (PLL) was proposed in the article. The working principle of the MEMS gyroscope was analyzed which pointed out the importanc...
For example, the working principle of a gyroscope requires a vacuum, special tools and eutectic bonding. A foundry has to consider carefully how much return they could generate from those added equipment costs and tools.” Fig. 3: Metal eutectic bonding, in which two metals are melted and ...
The working principle and dynamic analysis of this gyroscope are given and a set of optimized design parameters are derived based on the analysis. ANSYS FEM simulation is used to find out the device frequency and verify the theoretical prediction. The fabrication process flow of the MEMS gyroscope...
MEMS惯性传感器技术的误差补偿及可靠性研究_李瑞养
Firstly, the basic structure and working principle of the MEMS disk resonator gyroscope are expounded, and then the development of disk re?sonator gyroscope on sensitive structure design and evolution, quality factor improvement, frequency matching technology, nonlinear effect and parametric amplification ...
Fiber Optic Gyroscope Principle The working principle of fiber optic gyroscopes is based on the Sagnac effect. Introduction To Fiber Optic Gyro Fiber optic gyros, or fiber angular velocity sensors, are one of the most promising applications for various fiber optic sensors. ...
46.4 Gyroscope working principles and architecture design 46.5 Gyroscope technology architecture: key features and integration requirements 46.5.1 MEMS gyroscope structural layer 46.5.2 MEMS mechanical layer patterning 46.5.3 Wafer-level package 46.6 System integration example: STMicroelectronics THELMA technolog...
Fence structure micromachining vibratoryrate gyroscope[ D ] . Shang hai: Shanghai Institute ofMicros stem and Information Technology , 2001. ( i n Chinese ) [11]NajafiK. Precision read out circuits for capacitive micro accelerometers[ C ] MT he 3rd IEEE conference on Sensors.Vienna, Italy: I...
12.Keywords: micro-gyroscope, silicon single crystal, three-axis angular-rate sensing, natural frequency and mode shapes.关键词:微型陀螺仪、单晶、轴角速率感测、动自然频率与模态。 13.Reseach on Resonator Fiber Optic Gyroscope and Narrow-Linewidth Fiber Laser谐振式光纤陀螺仪及窄线宽光纤激光器研究 14...