The device layer is structured by a full layer thickness etch (and potentially one or several partial layer thickness etches) to form waveguiding structures, and the buried oxide prevents optical power leakage to the substrate. Several optimized doping levels in the device layer allow for modulator...
To realize their full potential, these emerging concepts require advanced very large-scale PICs, with tens or potentially hundreds of thousands of individual phase shifters and power couplers combined in a single photonic integrated circuit. In today’s standard technologies in state-of-the-art silic...
acceleration1. However, commercially available high-end gravimeters and seismometers are typically large in form-factor, because rather extensive measurement techniques are used, i.e., falling masses. The underlying physical factors that complicate the development of relative and open-loopng/Hzmicroelec...
The high frequency response of the sensor needs to be extended, ideally up to 20 kHz to capture the full tonal range of the instrument. MEMS accelerometer technology has clear potential for acoustic pickup applications in musical instruments, especially in live performances where acoustic feedback ...
Full size image In order to excite a MEMS device into resonant condition or vibration mode, an alternative driving must be performed by applying an AC voltage between the two plates of stator and rotor. The standard driving modes are shown as per the following [49]: simple alternative voltage...
Innovating for a greener future: The role of MEMS microphones in driving sustainable and energy efficient consumer electronics Share Join Dr. Gunar Lorenz, Sr director Technical Marketing and Application Engineering for Consumer Sensors, for this insightful keynote addressing the challenges the circular...
High performance, low fabrication cost, and low energy consumption are the main reasons that microelectromechanical systems (MEMS) [1,2] have been gaining more interest in engineering applications [3–5]; micro energy harvesters, microswitches, pressure sensors, micro resonators, mass flow sensors,...
TheVN-100is a miniature industrial-grade IMU/AHRS, combining 3-axis accelerometers, gyros, and magnetometers with a barometric pressure sensor and 32-bit processor, and individually calibrated over the full operating temperature range. Available in SMD or rugged enclosed form factors, it provides a...
Full size image In order to sustain the oscillation when\(\vec{B}=0\), or simply to characterize the device, an electrostatic driving is applied between the shield and sense electrodes. This creates an electrostatic force labeled asFein Fig.1, which allows to track the resonance frequency as...
In these approaches, the MEMS and IC manufacturing processes are completely decoupled, which results in full freedom of the design approaches and technology used for both the MEMS and IC chips. This enables rapid development cycles (short time-to-market) and relatively low development costs. The ...