MEMS-Based Hydrogen Gas Sensors. Sens. Actuators, B 2006, 117, 10-16.F. DiMeo, I. S. Chen, P. Chen et al., "MEMS-based hydrogen gas sensors," Sensors and Actuators B, 117(1), 10-16 (2006).DiMeo F Jr, Chen IS, Chen P, Neuner J, Roerhl A and Welch J. MEMS-based ...
近日,复旦大学微电子学院卢红亮教授课题组首次结合热氧化工艺、原子层沉积(ALD)工艺和溶剂热工艺合成了金属有机框架(MOF)修饰的α-Fe2O3@ZnO@ZIF-8核壳异质纳米线材料,并以此制备了低功耗MEMS基硫化氢(H2S)气体传感器,对浓度低至200 ppb H2S实现了超灵敏和高选择性的探测。相关成果以《Heterostructured α-Fe2O3...
Fabricated mircro-heater has been integrated with SnO2 based gas sensors for the efficient detection of H2 and NO2 gases. The developed sensors were found to yield the maximum sensing response of ∼184 and ∼2.1 with low power consumption of 29.18 and 34.53 mW towards the detection of...
Here we report the fabrication ofa high performance metal oxidesemiconductor (MOS) sensor for the detection of hydrogen sulfide (H2S) using PdRh bimetal hollow nanocube (HC) with Rh-rich hollowframe and Pd–rich core frame as sensitizing materials. PdRhbimetal HC with the edge-length about 10...
Using Acetate Anions To Induce Translational Isomerization in a Neutral Urea-Based Molecular Switch Stick-type biochemical gas sensors (bio-sniffer) with alcohol oxidase (AOD) and aldehyde dehydrogenase (ALDH) were developed for convenient analysis of bre... YL Huang,WC Hung,CC Lai,... - 《...
Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensi
国内外MEMS湿度传感器供应商主要有博世(BOSCH)、意法半导体(ST)、MEMS Vision、瑞士盛思锐(Sensirion)、精量电子(TE Sensors)。 MEMS气体传感器主要用于检测目标气体的成分、浓度等。国内外主要MEMS气体传感器供应商有博世(BOSCH)、奥地利微电子(AMS)、Cambridge CMOS Sensors(CCS)、瑞士盛思锐(Sensirion)、瑞士Micronas...
including magnetic sensors, optical and audio MEMS, as well as gas and particle sensors. He also collaborates with his team on custom studies for the key players in the MEMS industry. Pierre holds a master’s in Microelectronics and Photonics Engineering from Grenoble Institute of Technology, PHE...
Surface state trapping models for SnO2-based microhotplate sensors Due to their small size, SnO2-based microhotplate gas sensors can be used to develop a portable, sensitive, and low-cost gas monitoring system to detect, f... J Ding,TJ Mcavoy,RE Cavicchi,... - 《Sensors & Actuators B...
Micro-bead of nano-crystalline F-doped SnO 2 as a sensitive hydrogen gas sensor Gas sensor system was designed and fabricated using micro-electro mechanical system (MEMS) technology, coating the nano-crystalline F-doped SnO 2-based mat... CH Han,SD Han,I Singh,... - 《Sensors & Actuators...