Further, the method of mapping the load port module vision includes: a step (A) of installing a capturing unit installed at one side of the opening and closing unit opening a door of a FOUP of a load port module and performing lifting, and capturing an image of the inside of the FOUP...
The present invention relates to a mapping module with higher precision, and a door assembly of a load port including the same. Since a mapping arm is directly combined with a power generating unit without an extra relay unit such as a gear, precision is excellent and durability is ...