Furthermore, we show some of the advanced image optimization techniques that allow lithographic printing at the physical limits of resolution. In addition, we show that the future of optical lithography is likely to go well beyond the 30nm regime using advancements in 193nm double-patterning ...
Furthermore, we show some of the advanced image optimization techniques that allow lithographic printing at the physical limits of resolution. In addition, we show that the future of optical lithography is likely to go well beyond the 30nm regime using advancements in 193nm double-patterning ...
but also decades of incremental innovation and engineering of apparatus around the source.HIBLtechniques are, on the other hand, in their infancy but showing great potential. The success of theHIMin lithography encourages extensions of this technology to produce beams of other ion species. For examp...
We review the salient aspects of nanoimprint lithography and consider the challenges it faces in becoming a standard fabrication technique, such as costs a... S Zankovych,T Hoffmann,J Seekamp,... - 《Nanotechnology》 被引量: 384发表: 2001年 Lithography and Other Patterning Techniques for Future...
In lithography, spin coating of resists works well on flat surfaces. However, for irregular surfaces, alternative resist coating techniques, such as evaporation, are necessary. During evaporation, the material to be processed is loaded and heated in a high vacuum environment with a pressure of less...
integrated part of the overall nanoimprint patterning process. In a sense, the residual layer etch is similar to the develop process in conventional lithography. It has been proposed to combine photolithography and nanoimprint lithography techniques in one step in order to eliminate the residual layer...
Nanotechnology: a Boon or Bane? Nanotechnology is an umbrella term that is used to describe a variety of techniques to fabricate materials and devices on the nanoscale. Nanotechnological ... B Bhushan - Nanotechnology & Its Applications: First Shar 被引量: 0发表: 2007年 加载更多来源...
Techniques for wearable gas sensors fabrication ChengZhou, ...NingTang, inSensors and Actuators B: Chemical, 2022 3.4Nanoimprinting lithography High precision fabrication of micro/nanoscale structures based on a variety of materials is crucial to the development of micro/nanotechnology and nano science[...
The nanoscale control afforded by scanning probe microscopes has prompted the development of a wide variety of scanning-probe-based patterning methods. Some of these methods have demonstrated a high degree of robustness and patterning capabilities that are unmatched by other lithographic techniques. Howeve...
In: Alternative Lithography, Nanostruct. Sci. Technol., ed. by C. Sotomayor Torres (Kluwer, New York 2003) pp. 46–76 Google Scholar H.-C. Scheer, H. Schulz, T. Hoffmann, C.M. Sotomayor Torres: Nanoimprint techniques. In: Handbook of Thin Film Materials, Vol. 5, ed. by H....