The four fingers had the same length, 15 mm, the same width, 3 mm and different thicknesses: 700 μm, 500 μm, 300 μm, 100 μm. Figure 2 illustrates all the dimensions of the Micromachinesm2i0c1ro8-,f9in, g5e8rs and the test structure. The main body adjoining the four ...