Lead Zirconate Titanate (PZT) Based PiezoMEMS TechnologyR.G. PolcawichJ.S. PulskampG. SmithS. BedairT. IvanovR. ProieL. SanchezD.M. Potrepka
This section concentrates on the leading ferroelectric material used in thin-film piezoelectric MEMS: lead zirconate titanate (PbZrx Ti1x O3) or PZT. PZT-based MEMS technology has been explored extensively for a variety of actuator applications [1] but has received less attention for RF MEMS ...
D Kuscer,F Levassort,M Lethiecq,AP Abellard,M Kosec 摘要: Lead–zirconate–titanate (PZT) thick films for high-frequency ultrasound applications were fabricated using an electrophoretic deposition (EPD) process. The PZT powder was synthesized from constituent oxides at close-to-room temperature ...
Thermodynamic theory of the lead zirconate-titanate solid solution system, part IV: Tilting of the oxygen octahedra Values of coefficients related to the tilting of the oxygen octahedra in the low-temperature rhombohedral phase of the lead zirconate-titanate (PZT) solid solution system are needed in...
Hollow spheres of lead zirconate titanate (PZT) [chemical formula Pb(Zr0.52Ti0.48)O3)], with outer diameter of 1–2 mm and a wall thickness of about 100 μm, were fabricated by gellation of a PZT sol inside solid polymer spheres and then burning the polymer out. Monomodally sized polyac...
Nanopowders of lead zirconate titanate(PZT)are prepared by sol-gel method. 采用溶胶-凝胶法制备了粒径为30～50nm 锆钛酸铅 PZT 纳米压电粉体。4) PZT 锆钛酸铅(PZT) 1. Porous Piezoelecrtric PZT(lead zirconate titanate) ceramics were fabricated by BURPS(Burn-out plastic sphere composites),using...
Differential cathode-ray polarography is applied to the direct determination of lead, titanium and niobium in lead titanate-zirconate solid-solution ceramics containing small additions of niobium pentoxide. Titanium and niobium are determined in buffered EDTA solution at pH 4.0 and lead in 1 M hydrochl...
Ring-shaped lead zirconate titanate (PZT) piezoelectric vibrators were subjected to non-uniform mechanical stress applied by bolt clamping. 环形锆钛酸铅(PZT)压电振动器受到非均匀机械应力采用螺栓夹紧。 www.syyxw.com 2. lead zirconate titanate (PZT) pyroelectric ceramics 锆钛酸铅热释电陶瓷 www.hxen....
The electrical and reliability characteristics of lead-zirconate-titanate (PZT) ferroelectric capacitors are presented. Thin Pb(Zr/sub 0.5/Ti/sub 0.5/)O/sub 3/ films of 350 nm were prepared using a solution-gelatin technique. Hysteresis loop and pulse measurement methods indicate that PZT films ...
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