The plasma parameters in a hollow-cathode arc evaporating device were measured with a movable Langmuir probe during deposition of hard TiNx films. The following parameters are presented and discussed: ion density, plasma potential, electric field strength, electron energy distribution function and ...
The best solution to measure Plasma Parameters, Plasma Probe, Plasma Probe Diagnostics, Langmuir Probe, Plasma Density, Plasma Electron Temperature, Plasma Source, Remote Plasma Source
I.M. Hutchinson, “Principles of Plasma Diagnostics” (Cambridge Univ. Press, Cambridge, 1987), Chap. 3. N. Hershkowitz, How Langmuir Probes Work, in “Plasma Diagnostics”, Vol. 1, ed. by O. Auciello and D.L. Flamm (Academic Press, Boston, 1989), Chap. 3. 2 I. THE PROBE ...
Based on probe diagnostics the electron density and temperature as well as the plasma potential could be determined in dependence (i) on time in the discharge pulses and (ii) on parameters of the gas mixture including the N-2-H-2 ratio. Electron temperatures between 0.13 and 0.31 V and ...
plasma diagnostics; reactive etching; langmuir probe; end-point detection; eedf; optical-emission spectroscopy; 机译:等离子体诊断;反应蚀刻;朗缪尔探针;终点检测; edf;光发射光谱;; 入库时间 2022-08-26 13:44:23 相似文献 外文文献 中文文献 专利 1. Plasma Etching of poly-Si/SiO{sub}2/Si ...
(F.F.Chen)Langmuir Probe Diagnostics 热度: langmuir probe and microwave technique for ionized flows 热度: Evaluation of the impact of cantharidin on rat CYP enzymes by using a cocktail of probe drugs 热度: 相关推荐 万方数据 万方数据 万方数据 万方数据 万方数据 万方数据 万方数据...
1) Langmuir Probe Diagnostics 朗谬尔探针诊断 2) Langmuir probe 朗谬尔探针 1. Its characteristics and the uniformity of the plasma were studied with aLangmuir probeand other conventional probes. 本文运用朗谬尔探针方法诊断了放电等离子体的参量及其均匀性,运用发射光谱技术进行了Ar谱线[4s’(1/2)0-4p...
2) Langmuir probe 朗谬尔探针 1. Its characteristics and the uniformity of the plasma were studied with aLangmuir probeand other conventional probes. 本文运用朗谬尔探针方法诊断了放电等离子体的参量及其均匀性,运用发射光谱技术进行了Ar谱线[4s’(1/2)0-4p’(1/2)]的发光强度的表征,并使用自制的Rogows...
2) Langmuir probe 朗谬尔探针 1. Its characteristics and the uniformity of the plasma were studied with aLangmuir probeand other conventional probes. 本文运用朗谬尔探针方法诊断了放电等离子体的参量及其均匀性,运用发射光谱技术进行了Ar谱线[4s’(1/2)0-4p’(1/2)]的发光强度的表征,并使用自制的Rogows...
The European Physical Journal D - Atomic, Molecular, Optical and Plasma PhysicsKrasniqi, F.; Renner, O.; Dalimier, E.; Dufour, E.; Schott, R.; Forster, E. Possibility of plasma density diagnostics using Langmuir-wave-caused dips observed in dense laser plasmas. Eur. Phys. J. D 2006,...