Plasma Diagnostics with Langmuir Probes in the Equatorial Ionosphere: I. The Influence of Surface Contamination - Piel, Hirt, et al. () Citation Context ...for a mesothermal plasma a spherical probe collecting in the electron saturation region fits equation 1.5 with β = 0.5, which is unlike...
1) Langmuir Probe Diagnostics 朗谬尔探针诊断2) Langmuir probe 朗谬尔探针 1. Its characteristics and the uniformity of the plasma were studied with a Langmuir probe and other conventional probes. 本文运用朗谬尔探针方法诊断了放电等离子体的参量及其均匀性,运用发射光谱技术进行了Ar谱线[4s’(1/2)...
Langmuir probe and optical diagnostics of active screen N2–H2 plasma nitriding processes with admixture of CH4 Low pressure pulsed DC N-2-H-2 plasmas with admixtures of CH4 used for active screen plasma nitriding (ASPN) have been studied by time resolved Langmuir pr... M Hannemann,S Hamann,...
The effect upon measurements of electron temperature in high‐pressure plasmas of the cooling of the plasma electrons by the inherently cold layer of gas surrounding the probe has been investigated. Theoretical considerations indicate that while cooling effects can be substantial, accurate electron tempera...
2) Langmuir probe 朗谬尔探针 1. Its characteristics and the uniformity of the plasma were studied with aLangmuir probeand other conventional probes. 本文运用朗谬尔探针方法诊断了放电等离子体的参量及其均匀性,运用发射光谱技术进行了Ar谱线[4s’(1/2)0-4p’(1/2)]的发光强度的表征,并使用自制的Rogows...
关键词: Plasma oscillations Probe plasma diagnostics DOI: 10.1063/1.1746876 被引量: 7 年份: 1964 收藏 引用 批量引用 报错 分享 全部来源 免费下载 求助全文 AIP Publishing AIP Publishing (全网免费下载) 国家科技图书文献中心 (权威机构) IEEEXplore Semantic Scholar 查看更多 ...
The operation of Langmuir probes in rf plasmas typical of those employed in semiconductor processing is considered, with particular attention being paid to the rf potential difference which appears across the sheath of a dc probe inserted in an rf plasma. To overcome the problem, the probe describ...
Based on probe diagnostics the electron density and temperature as well as the plasma potential could be determined in dependence (i) on time in the discharge pulses and (ii) on parameters of the gas mixture including the N-2-H-2 ratio. Electron temperatures between 0.13 and 0.31 V and ...
Probe measurements of a plasma hollow cathode discharge used as a sputter source for copper thin film A hollow cathode discharge was constructed and characterized. The discharge is produced in argon gas inside the discharge cell, which consists of a hollow ... KH Metwaly,YH Elbashar - 《Journal...
plasmadiagnosticstechniqueL1J .Theycanprovidethe measurementofelectrontemperature,electronden- sity,andplasmapotentia1.Inplasmafluctuationor transientplasmastudies,however,thetraditional/-V curvesarenotavailablesincetheparametersaretime— dependent.Inthatcase,aLangmuirprobebasedon harmonictechnique[2]orsweepvoltage[...