“library” matching), or another fitting procedure of multiple datasets. Exemplary methods and systems for multiple tool and structure analysis is described in U.S. Pat. No. 7,478,019, issued on Jan. 13, 2009, to KLA-Tencor Corp., the entirety of which is incorporated herein by ...
and assigned to Tencor Instruments, which is hereby incorporated by reference. This method uses a single light beam scanned at a shallow angle over the object. The position of the collection system as well as the polarization of the light beam may be arranged to maximize the particle signal ...
This report summarizes the results of an evaluation of the KLA-Tencor (KT) 2138 Ultra-Broadband (UBB) optical inspection system performed in the DP1 development facility at Texas Instruments from July 1997 to November 1997. The purpose of this project was to evaluate the effectiveness of the ...
By using Macroaxis, you are agreeing to our revised Privacy Policy OKUnited States Sign In New Account About Macroaxis Solutions Settings Plans & Pricing Add KLA To Portfolio FinTech Suite AI Portfolio Architect AI Investing Opportunities Equity Analysis Sign In To Macroaxis SectorsEquity...