一.KLA2135报警处理二.KLA2138/39报警处理三.KLAAIT报警处理四.Tencor6420报警处理五.KLASP1报警处理 一.KLA2135报警处理 •1.手动退片(wafer在stage上)A.Initstage(calibration→InitSystem→Initstage)B.Initrobot(calibration→InitSystem→Initrobot)C.如果故障期间没有移动cassette,run→more→unload,一般情况下...
一.KLA2135报警处理二.KLA2138/39报警处理三.KLAAIT报警处理四.Tencor6420报警处理五.KLASP1报警处理 一.KLA2135报警处理 •1.手动退片(wafer在stage上)A.Initstage(calibration→InitSystem→Initstage)B.Initrobot(calibration→InitSystem→Initrobot)C.如果故障期间没有移动cassette,run→more→unload,一般情况下...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...
Windows 7 Professional SP1 64bit (OEM) System Builder DVD 1 Pack DATAKOM SMPS-1210 Generator Battery Charger / 12V/10A DC power supply RSP-750-15 750W Embedded Switch Mode Power Supply SMPS, 50A, 15Vdc ALIMENTATORE SMPS800RE +-72V. - 800W - PER AMPLIFICATORI ...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...
KLA-Tencor SP1 TBI Ellipsoid Collector 393541 New KLA-Tencor NGP, SP2 Mask Changer Assembly 0053106-002 KLA-Tencor AIT UV Laser Servo Detector 0099586-001 Used KLA-Tencor M1 3XX-I Active Mirror 760-321700-001 New KLA-Tencor F5 Flipper Actuator 52-0837 New KLA Tencor Extender Card 71...