CG6300提供更高的解析度、测量再现性以及高画质高解析度FEB测量装置(CD-SEM)CG6300通过电子光学系统的全新设计提高了解析度,并进一步提高了测量可重复性和图像画质。 电子显微镜线圈能够选择从对象材料反射出的二次电子和背向散射电子,实现BEOL制程*1的Via-in-trench*2和3D-NAND、DRAM工程中的深沟槽・洞底的尺寸...
Advanced CD Measurement SEM CG7300 For the EUV era device production – High Reliability CD-SEM Advanced CD Measurement SEM CS4800 A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs Advanced High Voltage CD-SEM “CV6300 Series” CV6300 Series is the ...
A recipe is a program (a collection of procedures, processing methods, parameters and input data) input into manufacturing system such as CD-SEM. Principles of measurement CD-SEMuses the grey level (contrast) signal of the SEM image.
Advanced CD Measurement SEM CG7300 For the EUV era device production – High Reliability CD-SEM Advanced CD Measurement SEM CS4800 A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs High Voltage CD-SEM CV7300 An in-line measurement system with 60kV acce...
Advanced CD Measurement SEM CG7300 For the EUV era device production – High Reliability CD-SEM Advanced CD Measurement SEM CS4800 A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs High Voltage CD-SEM CV7300 An in-line measurement system with 60kV ...
CD-SEM: Introducing the product lineup of HITACHI advanced Critical Dimension - Scanning Electron Microscope
CD-SEM: Introducing the product lineup of HITACHI advanced Critical Dimension - Scanning Electron Microscope
CD-SEM: Introducing the product lineup of HITACHI advanced Critical Dimension - Scanning Electron Microscope
CD-SEM: Introducing the product lineup of HITACHI advanced Critical Dimension - Scanning Electron Microscope