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机译:低能溅射法测量入射在Al和Al2O3表面的O + O2 + N +和N2 + 作者:Samuel L. Espy;Vanderbilt Univ.;Huntsville;AL;USA;I.F. Urazgildin;Vanderbilt Univ.;Nashville;TN;USA;Alan V. Barnes;Vanderbilt Univ.;Nashville;TN;USA;Y.Yao;Vanderbilt Univ.;Nashville;TN;USA;J.L. Allen;Vanderbilt Univ...
A MEMS fabrication process with through-glass vias (TGVs) by laser drilling was presented, and reliability concerns about MEMS packaging with TGV, likes debris and via metallization, were overcome. The via drilling process on Pyrex 7740 glasses was studi
1 Department of Electrical and Computer Engineering, University of Alabama in Huntsville, Huntsville, AL 35899, USA 2 Department of Chemistry, University of Alabama in Huntsville, Huntsville, AL 35899, USA * Author to whom correspondence should be addressed. ...
In Proceedings of the AIAA 16th Aerospace Sciences Meeting, Huntsville, AL, USA, 16–18 January 1978; pp. 16–18. 28. Wagner, R.E. Laser drilling mechanics. J. Appl. Phys. 1974, 45, 4631–4637. [CrossRef] © 2018 by the authors. Licensee MDPI, Basel, Switzerland. This article ...