Vacuum ge - tobarubuPURPOSE: To enhance the reliability of the vacuum shut-off function of a gate by preventing any foreign matter from adhering to the gate sealing surface of a vacuum gate valve.KAKIMOTO YOSHIHIRO柿本 義裕
PURPOSE:To obtain a simple structured vacuum gate valve by using bellows to prevent abrasion powder from being generated during the high-speed and frequent opening/ closing operation and utilizing a Faraday cup to close a valve plate. CONSTITUTION:A valve plate 12 is vertically moved while being ...
PURPOSE:To obtain a simple structured vacuum gate valve by using bellows to prevent abrasion powder from being generated during the high-speed and frequent opening/ closing operation and utilizing a Faraday cup to close a valve plate. CONSTITUTION:A valve plate 12 is vertically moved while being ...