EBL (Jeol EBL 6300FX) and oxygen plasma etching (16 W, 30 s) are used to pattern the bottom gates. PMMA 495 A3 (1000 µC cm−2 dose, with proximity effect correction in EBL process, developed in MIBK: IPA (volume ratio 1 : 3) mixture for 30 s) is used as ...
The pattern of variation of simulation results are consistent with the results of experimentally grown device by Ali et al. Ballistic current is also reported to improve from compressive to tensile strained channel. 展开 关键词: strain and wave function penetration Buried channel device high k ...
This layer acts as a sidewall which reduces the initial PMMA pattern size by 30–40 nm. A T‐shaped gate of a 70‐nm footprint is fabricated from a 0.1‐μm initial linewidth in PMMA using a lift‐off process. 展开 关键词: 8540Vb 8542+m ELECTRON BEAMS FABRICATION FIELD EFFECT ...
electrodes, by forming a gate pattern with an ordinary mesa shape before forming a reversed gate pattern, undercutting the side walls of the reversed gate pattern on the side of the gate electrode into an inverted mesa shape and forming the gate electrodes thinner than the reversed gate pattern...
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在此论文中,我们首先讨论对于一系列不同通道宽度及其通道数目之元件图案相依金属诱化侧向结晶薄膜电晶体(pattern-dependent metal-induced lateral crystallization (... 周政偉,Chou,ChengWei,施敏,... 被引量: 0发表: 2004年 Characterisation of in-situ doped polycrystalline silicon using Schottky diodes The N-...
a gate electrode stacked on a substrate, a source/drain pattern which fills a recess region formed at opposite sides adjacent to the gate electrode, the source/drain pattern being made of silicon-germanium doped with dopants and a metal germanosilicide layer disposed on the source/drain pattern....
A develop process is then used to remove portions of the resist material to form a sloped edge resist pattern. A sloped edge floating gate that is formed from the pattern facilitates the deposition of a thicker oxide layer at the sloped edge of the floating gate and reduces backend leakage ...
Double pattern and etch of poly with hard mask A system for fabricating a mixed voltage integrated circuit is disclosed in which a gate is provided that contains a gate oxide and a gate conductor on a substrate. A first mask is deposited to pattern the length of the gate by etching, .....
M. Pattern Recognition and Machine Learning (Springer, 2006). MATH Google Scholar Wittek, P. Quantum Machine Learning: What Quantum Computing Means to Data Mining (Elsevier, 2014). MATH Google Scholar Rebentrost, P., Mohseni, M. & Lloyd, S. Quantum support vector machine for big data ...