Fundamental Principles of Optical Lithography: The Science of Microfabrication; John Wiley & Sons: New York, 2007.C.A. Mack, Fundamental Principles of Optical Lithography : the Science of Microfabrication, (Chichester,West Sussex, England:Wiley, 2007).Mack C 2007 Fundamental Principles of Optical Lithogra- phy: The Science...
Its focus is on the underlying scientific principles of optical lithography, rather than its practice. It will serve equally well as a university textbook (each chapter has an extensive set of problems) and as an industry resource. Much of the material contained in this book is, of course, ...
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to...
光学结石造影基本原理Fundamental Principles of Optical Lithography-The Science of Microfabrication(2007) 下载积分: 700 内容提示: 1Introduction to Semiconductor LithographyThe fabrication of an integrated circuit (IC) involves a great variety of physical and chemical processes performed on a semiconductor (e...
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Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of eac...
ContentsPreface xv 1. Introduction to Semiconductor Lithography 1.1 Basics of IC Fabrication 1.1.1 Patterning 1.1.2 Etching 1.1.3 Ion Implantation 1.1.4 Process Integration 1.2 Moore’s Law and the Semiconductor Industry 1.3 Lithography Processing 1.3.1 Substrate Preparation 1.3.2 Photoresist Coating ...
当当中国进口图书旗舰店在线销售正版《【预订】Fundamental Principles of Optical Lithography》。最新《【预订】Fundamental Principles of Optical Lithography》简介、书评、试读、价格、图片等相关信息,尽在DangDang.com,网购《【预订】Fundamental Principles of Op
Fundamental Principles of Optical Lithography 电子书 读后感 评分☆☆☆ 评分☆☆☆ 评分☆☆☆ 评分☆☆☆ 评分☆☆☆ 类似图书 点击查看全场最低价 出版者:作者:Mack, Chris出品人:页数:534译者:出版时间:2008-1价格:78.00 元装帧:isbn号码:9780470018934...
, insulators and selectively doped regions are built up to form the fi nal device.The importance of lithography can be appreciated in two ways. First, due to the large number of lithography steps needed in IC manufacturing, lithography typically accounts MaskWaferMaskWaferFundamental Principles of ...