State of the art focused ion beam systems are compatible with ultrahigh vacuum systems and are capable of forming minimum beam diameters to the order of 50 nm with a current density limited by chromatic aberration of about 1 A cm 2 . Using these systems, unique processing techniques such as ...
The FIB technology is a micro-etching technology that uses the electrostatic lens to focus the ion beam into a very small size, and can achieve submicron resolution without the assistance of a mask and reduce or even prohibit the oxidation of MXene microelectrodes owing to its extremely small ...
TEM sample preparation is considered to be one of the most critical tasks in materials science research. However, it is also one of the most challenging and time-consuming. The latest technological innovations of DualBeam technology, along with our comprehensive software solutions and application expe...
Focused Ion and Electron Beam System & Triple Beam System NX2000 NX2000 was developed towards the ultimate TEM sample preparation system. FE electron source and high-sensitivity detection system allow high-contrast, real-time end point detection. Sample orientation control technology and Ar/Xe tripl...
Focused Ion Beam (FIB) Integrated circuit (IC) designers are learning that a technique long used on older process nodes is providing even more valuable benefits as they develop devices to be manufactured at advanced technology nodes, including 28nm and beyond. During a period when it takes $10...
focused ion beam technologymachiningnanostructured materialsnanotechnologynickelrough surfacessputter etchingsurface diffusionsurface roughness/ nanomachiningNanocrystalline and sub-microcrystalline samples of nickel have been machined by a focused Ga+ ion beam (30keV and 187pA) at doses of 8.92×1016–2.68×...
NAGASE, T., "Nano-gap Electrodes Developed Using Focused Ion Beam Technology", Handbook of Manufacturing Engineering and Technology, pp. 1513-1528, 2014N. T., "Nano-gap Electrodes Developed using Focused Ion Beam Technology," Handbook of Manufacturing Engineering and Technology, 2013....
Focused Ion and Electron Beam System & Triple Beam System NX2000 NX2000 was developed towards the ultimate TEM sample preparation system. FE electron source and high-sensitivity detection system allow high-contrast, real-time end point detection. Sample orientation control technology and Ar/Xe tripl...
Focused ion beam scanning electron microscopy (FIB SEM) instruments for automated structural analysis, TEM sample preparation, and nanoprototyping.
History of focused ion beam technology • Basic principle of focused ion beam technology • Utilization and fabrication method of focused ion beam technology • Advances in focused ion beam in last decade • Newly developed application of focused ion beam technology • Case Studies: Applicatio...