聚焦离子束(Focused Ion beam, FIB) 的系统是利用电透镜将离子束聚焦成非常小尺寸的显微切割仪器, 目前商用系统的离子束为液相金属离子源(Liquid Metal Ion Source, LMIS) , 金属材质为镓(Gallium, Ga) , 因为镓元素具有低熔点、 低蒸气压、 及良好的抗氧化力; 典型的离子束显微镜包括液相金属离子源、 电透镜...
Ion beam processing equipment combined with ion beam microscopeGallium metal emitting liquid metal ion sourceCondenser lensObjective lensIon beam scanning deflectorBing Web: stencil maskIt comprises a column 206 for processing ion beam irradiation, and the like.Ion beam irradiation axis 1003 of ion ...
FIB circuit edit is performed using a finely focused gallium (Ga+) ion beam with nanoscale resolution. It is possible to image etch and deposit materials on an IC with an extremely high level of precision. By removing and depositing materials, FIB circuit edit enables designers to cut and co...
Focused Ion Beam Milling in a Scanning Electron Microscope (FIB/SEM) FIB/SEM works by firing a narrow diameter beam of ions (typically gallium ions) at a sample held in a scanning electron microscope (Fig. 5(A)). The high-energy gallium ions sputter matter off of the target sample, and...
Gallium-free STEM and TEM sample preparation Multi-modal subsurface and 3D information Next-generation 2.5 μA xenon plasma FIB column View product Download datasheet Helios 5 Hydra DualBeam 4 fast switchable ion species (Xe, Ar, O, N) for optimized PFIB processing of a widest range of mater...
The design and operation of a FIB system are somewhat analogous to those of a scanning electron microscope (SEM). An ion column produces the energetic ions, collimates them, and focuses them on the sample surface. At present, commercial FIB systems use gallium (Ga) liquid metal ion sources,...
field-effect transistorsfocused ion beam implantationmaskless gallium dopingA maskless approach of forming pヾoped regions in Si wafers using the Ga source of a standard focused ion beam (FIB) system and the moderate activation temperatures of 400–700 °C is demonstrated in this work. This ...
focused gallium ion beam machiningMicro-dies for Co-less polycrystalline WC and WC–10wt%Co have been machined by a focused-Ga+-ion beam (30keV and 187pA) and their surfaces investigated by atomic force microscopy. The surface of the Co-less WC micro-die was extremely smooth with a ...
The gallium ion beam, although it offers a small beam size and high current density, the milling throughput is limited. The FIB system are being developed to provide a range of ion sources (Smith et al., 2014). For instance, xenon (Xe+), and helium (He−) ion beams are possible ...
DualBeam仪器系列包括多款FIB-SEM聚焦离子束扫描电子显微镜(双束电镜)产品,适用于自动结构分析、TEM 样品制备以及纳米原型设计。联系我们Focused ion beam scanning electron microscopy 学术界和工业界的科学家和工程师不断面临着需要对各种样品和材料进行高度局部表征的新挑战。提高这些材料质量的持续动力意味着常常需...