The preparation of drug/MPS was conducted using a DSC with nitrogen purge gas and Freon intra cooling system. First, the physical mixtures of drug and MPS powder with various weight ratios were placed into a crimped aluminum DSC pan, heated above 10 °C of the drug’s melting point using ...
GAS CHEMISTRY CYCLING TO ACHIEVE HIGH ASPECT RATIO GAPFILL WITH HDP-CVDPROBLEM TO BE SOLVED: To provide a method and device for depositing a dielectric film in a gap having an aspect ratio at least as large as 6:1.KWAN MICHAEL CHIU...