PROBLEM TO BE SOLVED: To provide a nozzle which produces a bigger distribution of gaseous cluster by utilizing together with extra-ultraviolet light source, and increases the efficiency of extra-ultraviolet light.THOMAS J FITZGERALDトーマスジェイフィッツジェラルドRICHARD H MOYER...
Date Dec. 27, 1996A nozzle arrangement comprising a plurality of nozzle assemblies arranged in an axially aligned and spaced apart arrangement, with a gas and/or liquid inspiration zone between the nozzle assemblies. Each nozzle assembly has a flow passage with an expansion zone formed proximate ...