B Wu,A Kumar 摘要: Extreme ultravioletlithography (EUVL) was thoroughly reviewed over a broad range of topics, including history, tools, source, metrology, condenser and projection optics, resists, and masks. Since 1988, many studies on EUVL have been conducted in North America, Europe, and ...
Extreme ultraviolet lithographyThis PrimeView highlights the future impacts of extreme ultraviolet lithography on semiconductor devices.doi:10.1038/s43586-024-00372-wNature Publishing Group UKNature Reviews Methods Primers
Extreme Ultraviolet Lithography 作者:Wu, Banqiu/ Kumar, Ajay 出版年:2009-5 页数:482 定价:$ 141.25 ISBN:9780071549189 豆瓣评分 目前无人评价 评价: 写笔记 写书评 加入购书单 分享到
Extreme ultraviolet (EUV) lithography is a soft X-ray technology, which has a wavelength of 13.5nm. Today’s EUV scanners enable resolutions down to 22nm half-pitch. In a system, an EUV light source makes use of a high power laser to create a plasma. This, in turn, helps emit a shor...
Extreme Ultraviolet Lithography 作者:Russell, Jesse; Cohn, Ronald; 出版社:Book on Demand Ltd. ISBN:9785511032160 豆瓣评分 目前无人评价 评价: 写笔记 写书评 加入购书单 分享到 推荐 我要写书评 Extreme Ultraviolet Lithography的书评 ···(全部 0 条)...
《ExtremeUltravioletLithography》作者:McGraw-HillProfessional,出版社:2009年4月,ISBN:2115.10。MasterExtremeUltravioletLithographyTechniquesProdu
网络极端紫外光刻 网络释义 1. 极端紫外光刻 极紫外光刻,EUVL,音... ... ) EUVL 极紫外投影光刻 )extreme-ultraviolet lithography极端紫外光刻) UV-lithography 紫外光刻 ... www.dictall.com|基于3个网页 例句
Extreme Ultraviolet Lithography 电子书 读后感 评分☆☆☆ 评分☆☆☆ 评分☆☆☆ 评分☆☆☆ 评分☆☆☆ 类似图书 点击查看全场最低价 出版者:作者:Wu, Banqiu/ Kumar, Ajay出品人:页数:482译者:出版时间:2009-5价格:$ 141.25装帧:isbn号码:9780071549189...
a next-generation lithography technology using an extreme ultraviolet (EUV) wavelength, currently expected to be 13.5 nm. 相关学科: 学科讨论 暂无讨论内容,你可以发起讨论推荐文献 发布年度 会议/ 期刊 按被引用数 Structure of the solar chromosphere. III. Models of the EUV brightness components of ...
United States Application US20180299765 Note: If you have problems viewing the PDF, please make sure you have the latest version of Adobe Acrobat. Back to full textHome Search Services Contact us © 2004-2024 FreePatentsOnline.com. All rights reserved. Privacy Policy & Terms of Use....