A wiping means 5 wipes off the surface of the wafer W and a robot carries in or out the carrier plate 1.;COPYRIGHT: (C)1994,JPO佐伯 和憲
;CONSTITUTION: A hand 5 consisting of a main hand body 1 and the intaglio roll wiping-out wiper holder means 2 attached to one end of the main hand body 1 through a repulsive press means 3 is attached to the arm 60 of an articulated robot 6.;COPYRIGHT: (C)1994,JPO正木 健一...
;CONSTITUTION: A hand 5 consisting of a main hand body 1 and the doctor blade wiping-out wiper holder means 2 arranged to one end of the main hand body 1 through a repulsive press means 3 is attached to the arm of an articulated robot 6.;COPYRIGHT: (C)1994,JPO正木 健一...