The equipment front end module body may include plurality of walls. One or more load locks or process chambers may be coupled to one or more first walls. One or more load ports may be provided in one or more second walls, wherein each of the one or more load ports are configured to ...
Equipment front end module (EFEM) systems and methods for handling workpieces at EFEMs are disclosed. An equipment front end module (EFEM) system has an enclosure and a robot within the enclosure. The enclosure has two or more load ports, each being adapted to receive a front opening unified...
Equipment front end module
Performix™ Equipment Front-End Module (EFEM) EFEM configurable for a wide range of semiconductor substrate processing applications Description Performix™ EFEM is an integrated sub-system for a wide range of semiconductor process applications, and had been deployed in the following applications areas...
Equipment front end module for transferring wafers 优质文献 相似文献High throughput method of in transit wafer position correction in system using multiple robots 1. A method of transferring wafers from a first location to a second location, comprising: a) extending a dual end effector arm of a ...
Example automatic test equipment (ATE) includes: a test instrument for outputting test signals to test a device under test (DUT), and for receiving output signals from the DUT, with the test instrument including a front-end module, and with the front-end module including internal circuitry for...
Design of an LTCC switch diplexer front-end module for GSM/DCS/PCS applications This paper presents the results of an antenna switch/filter module integrating GSM/DCS/PCS diplexer functions and Rx/Tx antenna switching on a low temperat......
Modeling, Simulation and Supervisory Control of Semiconductor Manufacturing Cluster Tools with an Equipment Front-End Module Due to extreme quality control requirements, recent cluster tools for semiconductor manufacturing processes tend to have an equipment front-end module (EFE... C Hong,TE Lee - ...
Front-end equipment integrated installation diagram 翻译结果5复制译文编辑译文朗读译文返回顶部 Front end equipment comprehensive installation diagram 相关内容 aback home 后面家[translate] aGood morning ,everybody 正在翻译,请等待... [translate] a希望你一直很开心 很幸福 Hoped you are continuously very happ...
tractor equipment Front End Loader (1 review) Shandong Sunco Aet Co., Ltd.Custom manufacturer15 yrsCN Key attributes Other attributes Warranty 1 Year Applicable Industries Manufacturing Plant, Machinery Repair Shops, Farms, Retail Weight (KG)