Epitaxy provides an essential link between the art and science of crystal growth and manufacturing of devices and circuits with applications in microelectronics, optoelectronics, and photonics. Therefore, continuing expansion of capabilities and the addition of new methods of epitaxy are important. They ...
Selected gated diodes within the IC are fabricated using the epitaxial growth process on the fins of the gated diode to form an anode and a cathode. Other selected gated diodes are fabricated without using epitaxial growth processes to form the anode and the cathode. In still another aspect, ...
RHEED was utilized in-situ to monitor the whole epitaxial growth process. The orientation and crys- tallinity of the as-grown thin films were investigated by the XRD at θ –2θ scan. The thickness and microstructure of thin films were obtained by the TEM. Cross-section TEM specimens ...
In addition to low surface roughness, improving the crystallinity of the cathode material could also minimize the intrinsic emittance introduced by grain boundaries and surface disorder37. Epitaxial growth of photocathodes on a lattice-matched substrate has become a popular approach to produce ultrasmooth...
Here we report the controllable growth and the intriguing transport behavior of epitaxial L21-Co2MnAl films, which exhibit a low-temperature (T) resistivity upturn with a pronounced T1/2 dependence, a robust independence of magnetic fields, and a close relevance to structural disorder. The ...
We found that SiH4 dilution in hydrogen during deposition controls the layer structure: the epitaxial growth happens for deposition conditions at the transition between the microcrystalline and amorphous growth regimes. SIMS and STEM-HAADF bring evidences for the interface chemical sharpness. Together, ...
Memory cell structures, including PSOIs, NANDs, NORs, FinFETs, etc., and methods of fabrication have been described that include a method of epitaxial silicon growth. The method includes providing a silicon layer on a substrate. A dielectric layer is provided on the silicon layer. A trench is...
Fabrication of a photonic integrated circuit (PIC) including active elements such as a semiconductor optical amplifier (SOA) and passive elements such as a floating rib waveguide. S
A method of epitaxial crystal growth is disclosed in which the lattice constants of adjacent layers are in the ratios of small integers other than one. This method permits the use of previously incompatible compounds, in particular the combination of magneto optic and electro optic elements on the...
The semiconductor integrated circuit (IC) industry has experienced exponential growth. Technological advances in IC materials and design have produced generations of ICs where each generation has smaller and more complex circuits than the previous generation. In the course of IC evolution, functional dens...