In this chapter, we discuss the various elements of lumped-parameter modeling in MEMS devices. These include the stiffness of microstructures, the inertia elements, and the damping mechanisms of energy dissipation in microstructures. The forces affecting microstructures due to actuation and detection are...
lumped element [′ləmpt ′el·ə·mənt] (electromagnetism) A section of a transmission line designed so that electric or magnetic energy is concentrated in it at specified frequencies, and inductance or capacitance may therefore be regarded as concentrated in it, rather than distributed ove...