Due to novel processing of gray levels the system is capable of detecting not only the hard defects such as shorts or opens, but also the soft failures, namely leakages and resistive contacts and vias. We illustrate this methodology by several examples from the most recent FinFET technology ...
KLA-Tencor’s eDR-7100 E-beam technology main feature is its ability to accurately identify extremely small defections. The eDR-7100 uses fourth-generation e-beam immersion optics that not only increases resolution, but allows the addition of images and image models for various types of de...
Besides speaking about its product plans, it also introduced new products and advertised its E-beam inspection equipment. KLA-Tencor’s eDR-7100 E-beam technology main feature is its ability to accurately identify extremely small defections. The eDR-7100 uses fourth-generation e-beam immersion...
Besides speaking about its product plans, it also introduced new products and advertised its E-beam inspection equipment. KLA-Tencor’s eDR-7100 E-beam technology main feature is its ability to accurately identify extremely small defections. The eDR-7100 uses fourth-generation e-beam immersio...