(CH3)4Sn and (C2H5)4Sn are desirable as the above-mentioned organic tin compound, and the inert gas such as H2, N2, Ar, He and the like which do not react with the organic tin compound is considered suitable as the organic tin compound to be used for doping. The degree of dilution...
Impurity do - pingu modulo null to PURPOSE:To realize the manufacture of P-type ZnS by a method wherein, by thermally diffusing a semiconductor at a high temperature, an impurity is intro du... 水田 正志 被引量: 0发表: 1994年 Uniform do - pingu method null to in vapor phase growth ...
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do - pingu manner null of semiconductor ue - ha due to the quick heat treatment of solid-state plate-like diffusionDoping of a semiconductor wafer is accomplished by placing the wafer in close proximity to a solid planar dopant source and rapidly heating the combination to a high temperature ...
Control of the doping concentration is enabled by changing the concentration of a second gas containing SiH4-xClx(x=1-4). With this, a doping having high uniformity and high concentration controllability is performed.MATSUMOTO TAKU松本 卓
(CH3)4Sn and (C2H5)4Sn are desirable as the above-mentioned organic tin compound, and the inert gas such as H2, N2, Ar, He and the like which do not react with the organic tin compound is considered suitable as the organic tin compound to be used for doping. The degree of dilution...
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