nanofabricationtransistorThe development of novel doping strategies compatible with high‐resolution patterning and low cost, large﹕cale manufacturing is critical to the future development of electronic devices. Here, an approach to achieve nanoscale site﹕pecific doping of Si wafer using DNA as both ...
Another key benefit of SiC is its capacity to grow a thermally stable native silicon dioxide (SiO2) layer, which makes it directly compatible with well-established micro- and nanofabrication technologies [24,36] for silicon-based devices and complementary metal-oxide semiconductor (CMOS) applications...