The present disclosure relates to substrates for use in microwave plasma reactors. Certain substrates include a cylindrical disc of a carbide forming refractory metal having a flat growth surface on w
A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition includes a microwave generator configured to generate microwaves at a frequenc
Defects in device grade homoepitaxial diamond thin films grown with ultra-low CH4/H2 conditions by microwave-plasma chemical vapor deposition. Physica Status Solidi A: Applied Research, 1999, 174(1): 101–115 Article CAS Google Scholar Takeuchi D, Yamanaka S, Watanabe H, et al. Device grade...
Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD - ScienceDirect Repetition of high rate homoepitaxial growth of diamond by microwave plasma CVD has been successfully applied to the growth of single-crystal diamonds with... Y Mokuno,A Chayaha...
The microwave generator 5 was a gyrotron generating microwave radiation with its frequency 30 GHz and power up to 10 kW manufactured by GYCOM Ltd. (Nizhny Novgorod, Russia). The circular oversized waveguide 14 with a corrugated internal surface equipped with the wave beam divider 15, which were...