DC sputtering RF Sputter DepositionPhys, P E S
Chemical analysis using XPS showed that pulsed-DC sputtering had a higher deposition rate, oxygen binding rate, oxygen vacancy ratio, bandgap and good uniformity than RF sputtering. Subsequently, the density of the thin film was analyzed using XRR. When applied to TFT devices, the threshold ...
Instead of RF sputtering, DC sputtering was chosen to deposit ZrInO films for its advantages of high deposition rate, good reproducibility, good uniformity for multi-component film, no need of power matching, and no RF-radiation danger29–31. The gate dielectric layer of the ZrInO TFTs was ...
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Therefore, combination with other nonmetal elements, such as N, C and B, for synthesizing the WN [10], or WC [11], or WB [12] composite film using the processes of RF/DC sputtering [[13], [14], [15], [16], [17]] or CVD [18], was considered as the effective method to ...
ZrN-ZrO $${ }_{x}$$ N $${ }_{y}$$ and ZrO $${ }_{2}$$ -ZrO $${ }_{x}$$ N $${ }_{y}$$ coatings were deposited on 316L stainless steel substrates via the unbalanced DC magnetron sputtering technique in order to improve their corrosion resistance and evalua
Martinez and Guillen studied the electrical, morphological and structural properties of Mo thin films grown by using RF magnetron sputtering for various deposition parameters [6]. They determined that all the films have equivalent electrical properties. Nevertheless, to obtain densely packed structure and...
The WO3 films and Ag films were deposited on the coring glass by using DC and RF magnetron sputtering. The structural, optical, and Electrochromic properties of WO3 thin films were discussed. 2. Materials and experimental method 2.1. Materials used The specifications of the corning glass are pre...
采用NH3气氛处理直流/射频共溅射方法制得的ZnO:Al薄膜,从而获得Al+N共掺p型ZnO薄膜。 The p-type ZnO:Al films deposited by RF/DC magnetron sputtering at room temperature were treated by ...
6) DC-reactive magnetron sputtering 直流磁控溅射法 例句>> 补充资料:磁控溅射 分子式:CAS号:性质:用一个环形永久磁体在乎板形靶上产生环形磁场,在磁场作用下,电子被约束在一个环状空间内,形成高密度的等离子环。在等离子环内,电子不断地使Ar原子变成Ar离子,Ar离子被加速后打向靶表面,把靶内的原子溅射出来,...