the metal layer is not oxidized. The modified method for forming the oxide layer may be performed by PECVD, CVD, ALD, or physical vapor deposition (PVD). The plasma (oxygen-free precursor and/or oxygen-containing gas) may be formed in-situ or formed at a remote location, such as in a...
et al., Microstructural Investigations of EBPVD Thermal Barrier Coatings, Journal De Physique IV, Colloque C9, supplément au Journal de Physique III, vol. 3, Dec. 1993, pp. 645-654. Masso, J.D., Evaluation of Scratch Resistant and Antireflective Coatings for Plastic Lenses, 32nd Annual ...