In contrast, ASML's single EUV scanner can cost up to $380 million without OpEx, which is very high thanks to the power consumption of high-energy light UV light emitters. Regular EUV scanners also lose 40% of the UV light going to the next mirror, with only 1% of the starting light...
and it scans (33mm) across the reticle area. This gif below thatAndreas Schillingshared is from ASML about High-NA EUV showcases the concept. With High-NA EUV, the slit is still a 26mm maximum, and the scan is halved. The main loss of productivity is with how fast the wafer...