AustinTXUSAChris A. MackFINLE TechnologiesInc.AustinTXAdvances in Resist Technology and Processing XIIPetersen JS, Mack CA, Sturtevant JL, Byers JD, Miller DA. Nonconstant diffusion coefficients: short description of modeling and comparison to experimental results. Proc SPIE 1995;2438:167-80....