20GHz.However,thevaluesofRLCGintheequivalentcir- cuitareextractedfromcylindricalTSVscatteringmatrixmea- surement.InReferences[4–6],thescalableelectricalmodels forcylindricalTSVhavebeenproposed,andallthevaluesof RLCGwereextractedfromanalyticalequations.Althoughthe above works make a lot of contributions to the ...